Graduate Course Descriptions

The following directory lists the graduate courses which the University expects to offer, although the University in no way guarantees that all such courses will be offered in any given academic year, and reserves the right to alter the list if conditions warrant. Click on the links below for a list of courses in that subject area. You may then click “View Classes” to see scheduled classes for individual courses.

6242. VLSI Fabrication Principles

3.00 credits

Prerequisites: None.

Grading Basis: Graded

Semiconductor materials and processing, emphasizing compound semiconductors, optoelec-tronic materials, shallow devices, and fine-line structures. Semiconductor material properties; phase diagrams; crystal growth and doping; diffusion; epitaxy; ion implantation; oxide, metal, and silicide films; etching and cleaning; and lithographic processes.

No classes found.